Find out what he likes to eat. Be as subtle as possible; maneuver the question into a casual conversation. For example, "My friends and I went to this really great Mexican restaurant last weekend. Do you like Mexican food?" or, "I love going to visit my mom and getting some home cooking. What's your favorite dish for your mom to make?", or "I think I'll take some leftovers to work for lunch. What do you usually eat for lunch?"
Ask if he's busy on the night in question before asking him to come over. If you ask him dinner on an evening he has other plans, he might have to decline. Don't allow yourself to wonder if he turned you down because he doesn't like you, or because he really is busy.
Suggest an entire experience, not just dinner. For example, "My favorite '80s movie is coming on cable tonight. Want to watch with me? I can whip us up some steak and potatoes." Or "I'd love to see your pictures from your trip to Africa. How about I make us dinner while we look them over. We can make a night of it."
Give him chores to do so he doesn't feel like you're going to too much trouble. Ask him to pick up wine and something sweet for dessert. When he arrives, ask him to do something simple to help prepare the meal, like chopping vegetables, warming bread or slicing cheese. If nothing else, have him uncork and pour the wine.
Have something ready to eat when he gets there. Although you'll likely go to a lot of effort to make yourself and your home look perfect, don't forget that he came to eat. He'll likely be hungry when he arrives. Even if the main course isn't ready, have an appetizer waiting.
Do not feel obligated to physically interact with him beyond your comfort level. An invitation to dinner at your home is just that -- dinner. The invitation shouldn't come with any additional expectations, either of you or of him. Remember you don't have to do anything you don't want to do. According to Maura Kelly of Marie Claire Magazine, a dinner date is not an automatic invitation to have sex.